摘要 |
The present invention relates to a coil unit for thin film inductor, to a method for manufacturing the same, to a thin film inductor, and to a method for manufacturing the same. According to the present invention, the coil unit for thin film inductor includes: an insulating material having a double insulating layer of different materials; and a coil pattern which is formed to be installed inside the upper and lower sides of the insulating layer, wherein the coil pattern is formed on a plurality of plating layers. Also, the method for manufacturing the coil unit for thin film inductor according to the present invention includes the steps of: forming a first coil pattern on each of a pair of metal layers which adheres to each of both sides of a base layer through an adhesive layer; forming the first insulating layer to be installed inside the first coil pattern; forming a second coil pattern and a second insulating layer to be installed inside the second coil pattern to be formed on a plurality of plating layers; and separating a pair of metal layers from the base layer, wherein the first and second insulating layers are formed as different materials, respectively. |