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发明名称
SPUTTERING DEVICE FOR FERROMAGNETIC MATERIAL
摘要
申请公布号
JPH02273323(A)
申请公布日期
1990.11.07
申请号
JP19890094812
申请日期
1989.04.14
申请人
FUJI ELECTRIC CO LTD
发明人
ARISAWA TAKESHI
分类号
C23C14/34;G11B5/85;G11B5/851
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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