| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electromechanical conversion film capable of forming the electromechanical conversion film of a desired pattern without attaching unneeded droplets to an electrode when discharging a coating liquid containing a raw material for forming the electromechanical conversion film from a nozzle and coating the electrode with the liquid. <P>SOLUTION: The manufacturing method of the electromechanical conversion film includes: a coating process of selectively coating with the coating liquid a prescribed part on a first electrode by a droplet discharge method of discharging droplets of the coating liquid containing the raw material for forming the electromechanical conversion film from the nozzle; a drying process of drying the film of the coating liquid on the first electrode; and a crystallizing process of thermally decomposing and crystallizing the dried film of the coating liquid. The coating process includes a recovery process of recovering fine accompanying droplets accompanying main droplet of the coating liquid discharged from the nozzle before reaching the first electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
