Apparatus having a roughness measurement sensor and corresponding methods

摘要

An apparatus having a roughness sensing system and a roughness measurement sensor, wherein a slide element and a probe tip come to operation, and method of use thereof. The slide element is arranged on an extreme end of a probe pin in the form of a scan-slide element. The probe tip is integrated into the probe pin, and the distance between the scan-slide element and the probe tip is predetermined. The roughness sensing system is a 1D-, 2D- or 3D-scanning system having a parallelogram configuration. The apparatus further has a serving device which enables moving the probe pin together with the scan-slide element and the probe tip jointly over a surface to be scanned.

主权项

1. An apparatus, comprising:
a roughness sensing system comprising a 1D-, 2D- or 3D-scanning system and having a parallelogram configuration; a roughness measurement sensor including a probe pin having a slide element comprising a scan-slide element located at an end of the probe pin and a probe tip integrated with the probe pin at a predetermined distance from the scan-slide element; and an advancing device adapted to jointly move the probe pin together with the scan-slide element and the probe tip over a surface to be scanned; wherein the roughness sensing system provides (a) a first signal that allows a conclusion on the shape or geometry of a scanned surface , and (b) a second signal that allows a conclusion on the roughness of said scanned surface; said apparatus being further configured to at least one of spatially and temporally correlate the signals to align the signals at least one of spatially or temporally.