| 发明名称 | Cryopump system and method for regenerating cryopumps | ||
| 摘要 | A cryopump system includes: a plurality of cryopumps connected to a common roughing pump and provided with a plurality of rough valves, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves. | ||
| 申请公布号 | US8959933(B2) | 申请公布日期 | 2015.02.24 |
| 申请号 | US201213471136 | 申请日期 | 2012.05.14 |
| 申请人 | Sumitomo Heavy Industries, Ltd. | 发明人 | Ando Masamichi |
| 分类号 | B01D8/00;F04B41/06;F04B37/08 | 主分类号 | B01D8/00 |
| 代理机构 | Rader, Fishman & Grauer PLLC | 代理人 | Rader, Fishman & Grauer PLLC |
| 主权项 | 1. A cryopump system comprising: a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in a rough line, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps, wherein a delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves,wherein the controller enables the delay time when any one of the plurality of cryopumps is depressurized to a predetermined internal pressure or less. | ||
| 地址 | Tokyo JP | ||