发明名称 Optical bio sensor and making method
摘要 <p>In the present invention, provided is an optical biosensor with a nanogap structure, thereby disclosing an optical biosensor and a manufacturing process thereof, wherein the optical biosensor comprises a first optical waveguide which is installed between the nanogaps; and a second optical waveguide has a metal layer on the surface of the second optical waveguide where light moves in a vertical direction with respect to the first optical waveguide. In the present invention, the provided optical biosensor is allowed to reduce a processing time and make manufacturing processes simple by using the optical waveguide with nanogap.</p>
申请公布号 KR101494551(B1) 申请公布日期 2015.02.24
申请号 KR20130154242 申请日期 2013.12.11
申请人 发明人
分类号 G01N21/00;G01N33/483;G02B6/10 主分类号 G01N21/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利