| 摘要 |
An acoustic transducer according to the present invention includes a substrate with a hollow part, a first support structure which includes a first support unit which upwardly protrudes along the outline of the hollow part and is attached to the upper side of the substrate, a second support structure which includes a second support unit which downwardly protrudes on a position corresponding to the first support unit, a thin film diaphragm which is located between the first and second support units, is formed rather on the outline to the outside of a radius direction than the inside of the upper end of the hollow part, and completely covers the hollow part, and a top fixing electrode which is formed on the upper side of the diaphragm and forms a capacitor by interaction with the diaphragm on a position to face the diaphragm. Thus, provided is an acoustic transducer with high sensitivity by improving the sensitivity of the diaphragm. |
