发明名称 AN SOI TRANSISTOR HAVING AN EMBEDDED STRAIN LAYER AND A REDUCED FLOATING BODY EFFECT AND A METHOD FOR FORMING THE SAME
摘要 <p>By forming a portion of a PN junction within strained silicon/germanium material in SOI transistors with a floating body architecture, the junction leakage may be significantly increased, thereby reducing floating body effects. The positioning of a portion of the PN junction within the strained silicon/germanium material may be accomplished on the basis of implantation and anneal techniques, contrary to conventional approaches in which in situ doped silicon/germanium is epitaxially grown so as to form the deep drain and source regions. Consequently, high drive current capability may be combined with a reduction of floating body effects.</p>
申请公布号 KR101494859(B1) 申请公布日期 2015.02.23
申请号 KR20087029318 申请日期 2007.03.29
申请人 发明人
分类号 H01L21/336 主分类号 H01L21/336
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