| 摘要 |
PROBLEM TO BE SOLVED: To prevent scratches on a holding surface a holding table and a grinding surface of grinding means in measuring a distance between the holding surface of and the grinding surface, and shorten a measurement time.SOLUTION: A grinding device (1) includes: a holding table (3) for holding a plate-like workpiece (W) on a holding surface (3a); grinding means (4) for making a grinding surface (4e) of a grind stone (4d) in contact with the plate-like workpiece for grinding; and measuring means (5) for measuring a distance between the holding surface and the grinding surface. In the measuring means (5), measurement light (B) is projected from a light projection part (51a) to a splitter (53) inserted between the holding surface and the grinding surface by insertion means (54), and a light receiving part (51b) receives a first reflected light (C1) reflected from the holding surface and a second reflected light (C2) reflected from the grinding surface to measure the distance between the holding surface and the grinding surface. |
