发明名称 Lateral junctiion field-effect transistor and its manufacturing method
摘要 A lateral junction field effect transistor includes a first gate electrode layer ( 18 A) arranged in a third semiconductor layer ( 13 ) between source/drain region layers ( 6, 8 ), having a lower surface extending on the second semiconductor layer ( 12 ), and doped with p-type impurities more heavily than the second semiconductor layer ( 12 ), and a second gate electrode layer ( 18 B) arranged in a fifth semiconductor layer ( 15 ) between the source/drain region layers ( 6, 8 ), having a lower surface extending on a fourth semiconductor layer ( 14 ), having substantially the same concentration of p-type impurities as the first gate electrode layer ( 18 A), and having the same potential as the first gate electrode layer ( 18 A). Thereby, the lateral junction field effect transistor has a structure, which can reduce an on-resistance while maintaining good breakdown voltage properties.
申请公布号 US2005093017(A1) 申请公布日期 2005.05.05
申请号 US20040496040 申请日期 2004.05.19
申请人 FUJIKAWA KAZUHIRO;HARADA SHIN;HIROTSU KENICHI;HATSUKAWA SATOSHI;HOSHINO TAKASHI;MATSUNAMI HIROYUKI;KIMOTO TSUNENOBU 发明人 FUJIKAWA KAZUHIRO;HARADA SHIN;HIROTSU KENICHI;HATSUKAWA SATOSHI;HOSHINO TAKASHI;MATSUNAMI HIROYUKI;KIMOTO TSUNENOBU
分类号 H01L21/337;H01L29/808;(IPC1-7):H01L29/51 主分类号 H01L21/337
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