发明名称 METHOD FOR PRODUCING STRUCTURAL BODY INCLUDING PHASE SEPARATION STRUCTURE, PHASE SEPARATION STRUCTURE AND BLOCK POLYMER COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a structural body including a phase separation structure, to provide a phase separation structural, and to provide a block copolymer composition.SOLUTION: Provided is a method for producing a structural body involving a phase separation structure, including: a step of applying a neutralized film 2 to the surface of a substrate 1; a step of applying a block polymer 3 with the mass average molecular weight of 150,000 or higher in which a plural kinds of polymers are coupled to the surface of the layer made of the neutralized film 2 to form a layer having the coating film thickness of 23 nm or lower and including the block polymer 3; and a step of phase-separating the layer including the block polymer 3.
申请公布号 JP2015033753(A) 申请公布日期 2015.02.19
申请号 JP20130166687 申请日期 2013.08.09
申请人 TOKYO OHKA KOGYO CO LTD 发明人 KUROSAWA TSUYOSHI;SHIONO HIROHISA;MIYAGI MASARU;MATSUMIYA YU;MIYASHITA KENICHIRO;OMORI KATSUMI
分类号 B82B3/00;B32B27/30;B82Y30/00;B82Y40/00;C08L53/00;H01L21/027 主分类号 B82B3/00
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