发明名称 |
METHOD FOR PRODUCING STRUCTURAL BODY INCLUDING PHASE SEPARATION STRUCTURE, PHASE SEPARATION STRUCTURE AND BLOCK POLYMER COMPOSITION |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a structural body including a phase separation structure, to provide a phase separation structural, and to provide a block copolymer composition.SOLUTION: Provided is a method for producing a structural body involving a phase separation structure, including: a step of applying a neutralized film 2 to the surface of a substrate 1; a step of applying a block polymer 3 with the mass average molecular weight of 150,000 or higher in which a plural kinds of polymers are coupled to the surface of the layer made of the neutralized film 2 to form a layer having the coating film thickness of 23 nm or lower and including the block polymer 3; and a step of phase-separating the layer including the block polymer 3. |
申请公布号 |
JP2015033753(A) |
申请公布日期 |
2015.02.19 |
申请号 |
JP20130166687 |
申请日期 |
2013.08.09 |
申请人 |
TOKYO OHKA KOGYO CO LTD |
发明人 |
KUROSAWA TSUYOSHI;SHIONO HIROHISA;MIYAGI MASARU;MATSUMIYA YU;MIYASHITA KENICHIRO;OMORI KATSUMI |
分类号 |
B82B3/00;B32B27/30;B82Y30/00;B82Y40/00;C08L53/00;H01L21/027 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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