发明名称 ENCAPSULATED MAGNETRON
摘要 <p>Embodiments of the present invention generally provide a magnetron that is encapsulated by a material that is tolerant of heat and water. The encapsulated magnetron is described above and in the attached appendix. In one embodiment, the entire magnetron is encapsulated. In another embodiment, the magnetron includes magnetic pole pieces, and the magnetic pole pieces are not covered by the encapsulating material.</p>
申请公布号 WO2015023400(A1) 申请公布日期 2015.02.19
申请号 WO2014US47481 申请日期 2014.07.21
申请人 APPLIED MATERIALS, INC. 发明人 WEST, BRIAN T.;JOHNSON, ROGER M.;COX, MICHAEL S.
分类号 C23C14/35 主分类号 C23C14/35
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