SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES

摘要

Implementations of the present disclosure relate to a sputtering target for a sputtering chamber used to process a substrate. In one implementation, a sputtering target for a sputtering chamber is provided. The sputtering target comprises a sputtering plate with a backside surface having radially inner, middle and outer regions and an annular-shaped backing plate mounted to the sputtering plate. The backside surface has a plurality of circular grooves which are spaced apart from one another and at least one arcuate channel cutting through the circular grooves and extending from the radially inner region to the radially outer region of sputtering plate. The annular-shaped backing plate defines an open annulus exposing the backside surface of the sputtering plate.

主权项

1. A sputtering target for a sputtering chamber, the sputtering target comprising:
a sputtering plate with a backside surface having radially inner, middle and outer regions, the backside surface having:
a plurality of circular grooves which are spaced apart from one another; andat least one arcuate channel cutting through the circular grooves and extending from the radially inner region to the radially outer region of the sputtering plate; and an annular-shaped backing plate mounted to the sputtering plate, wherein the annular-shaped backing plate defines an open annulus exposing the backside surface of the sputtering plate.