发明名称 SEMICONDUCTOR TESTING JIG
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor testing jig capable of improving workability at a time of testing a plurality of vertical semiconductor devices, shortening testing time, and easily dealing with various sizes of semiconductor devices.SOLUTION: A semiconductor testing jig is used to test a plurality of vertical semiconductor devices 5 each including a lower surface electrode 3 and an upper surface electrode 4. A conductive base 1 includes a plurality of installation portions 6 in which the vertical semiconductor devices 5 are individually installed in a state in which the lower surface electrodes 3 contact the installation portions 6. A lattice insulating frame 2 is provided on the base 1 for surrounding the installation portions 6. The frame 2 is replaceable depending on sizes of the vertical semiconductor devices 5 to be installed.
申请公布号 JP2015034704(A) 申请公布日期 2015.02.19
申请号 JP20130164344 申请日期 2013.08.07
申请人 MITSUBISHI ELECTRIC CORP 发明人 OKADA AKIRA;YAMASHITA KINYA;AKIYAMA HAJIME;NOGUCHI TAKAYA
分类号 G01R31/26;H01L21/336;H01L21/66;H01L29/78 主分类号 G01R31/26
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