| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve such a problem that when measuring the concentration of high concentration ozone gas of 200 g/Nm<SP POS="POST">3</SP>or more, it is necessary to make the length of ultraviolet optical path for ozone absorption extremely short in a conventional ultraviolet absorption type ozone concentration meter, and therefore pressure loss for allowing ozone gas to flow is large, photodissociation of ozone occurs due to ultraviolet rays and a reduction in concentration is likely to occur. <P>SOLUTION: When a visible light source, especially light of wavelength of about 550 to 630 nm, is used, the concentration of high concentration ozone gas of 200 g/Nm<SP POS="POST">3</SP>or more can be also measured by allowing ozone gas to pass through or stay in a wide space, and the ozone gas concentration can be accurately measured without the occurrence of ozone decomposition. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
