| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wafer processing apparatus which can prevent product failure even when failing in exchange of a processed wafer on a wafer holder. <P>SOLUTION: A wafer processing apparatus 1 comprises: a wafer holder 31 having pedestals P1-P13; a wafer transfer mechanism 30 rotating the wafer holder 31 after wafers loaded on the pedestals P1-P13 are processed so as to sequentially position the pedestals P1-P13 at prescribed attachment positions to remove the wafers from the positioned pedestals and subsequently loading unprocessed wafers on the pedestals; a wafer transfer control part 62; and a detection sensor 38. The wafer holder 31 includes a detection target part 31s. The detection sensor 38 outputs a determination signal indicating whether a position of the detection target part 31s coincides with a reference position when any one of the pedestals P1-P13 is positioned at the attachment position. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
