| 发明名称 | Heat treatment furnace and heat treatment apparatus | ||
| 摘要 | Provided is a heat treatment furnace, which includes a processing vessel configured to accommodate at least one object to be processed, a heat insulating member configured to cover a periphery of the processing vessel, and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member. The heat insulating member includes an inner heat insulating member and an outer heat insulating member formed independently of the inner heat insulating member. The outer heat insulating member contains a finely-powdered compressed silica material, and at least an outer surface thereof is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered. | ||
| 申请公布号 | US8957352(B2) | 申请公布日期 | 2015.02.17 |
| 申请号 | US201213533291 | 申请日期 | 2012.06.26 |
| 申请人 | Tokyo Electron Limited | 发明人 | Kobayashi Makoto |
| 分类号 | H05B3/06;H01L21/67;F27D5/00 | 主分类号 | H05B3/06 |
| 代理机构 | Nath, Goldberg & Meyer | 代理人 | Nath, Goldberg & Meyer ;Meyer Jerald L. |
| 主权项 | 1. A heat treatment furnace, comprising: a processing vessel configured to accommodate at least one object to be processed; a heat insulating member configured to cover a periphery of the processing vessel; and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member, wherein the heat insulating member includes an inner heat insulating member and an outer heat insulating member formed independently of the inner heat insulating member, and wherein the outer heat insulating member contains a finely-powdered compressed silica material, and at least one outer surface of the outer heating insulating member is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered. | ||
| 地址 | Tokyo JP | ||