Method of detecting condensing spot position in laser beam processing apparatus

摘要

A method of detecting a condensing spot position in a laser beam processing apparatus, including: a detection position setting step of setting a plurality of Z-axis directional positions in a range from a starting point to an ending point of detection positions into which the condenser is positioned; a laser beam processed groove forming step of sequentially positioning the condenser into the detection positions in the range from the starting point to the ending point, performing a predetermined interval indexing feeding by operating indexing feeding means each time the detection position for the condenser is changed, and forming a laser beam processed groove of a predetermined length in the plate-shaped body at each of the detection positions for the condenser; and a laser beam processed groove imaging step of imaging the laser beam processed grooves formed in the plate-shaped body by imaging means.

主权项

1. A method of detecting a condensing spot position in a laser beam processing apparatus including: workpiece holding means provided with a holding surface for holding a workpiece thereon; laser beam irradiation means provided with a condenser for irradiating the workpiece held on the workpiece holding means with a laser beam; processing feeding means for relative processing feed of the workpiece holding means and the laser beam irradiation means in a processing feed direction (X-axis direction); indexing feeding means for relative indexing feed of the workpiece holding means and the laser beam irradiation means in an indexing feed direction (Y-axis direction) orthogonal to the processing feed direction (X-axis direction); condensing point control means for moving the laser beam irradiation means in a direction (Z-axis direction) perpendicular to the holding surface of the workpiece holding means; Z-axis directional position detection means for detecting the Z-axis directional position of the condenser controlled by the condensing point control means; imaging means for imaging the workpiece held on the workpiece holding means; and display means for displaying an image picked up by the imaging means, the method comprising:
a plate-shaped body holding step of holding a plate-shaped body having a predetermined thickness on the holding surface of the workpiece holding means; a reference position setting step of setting a reference position in the Z-axis direction of the condenser according to a designed value of a condensing spot of the laser beam condensed by the condenser and the thickness of the plate-shaped body; a detection position setting step of setting a detection region in excess of a range of errors between the designed value and an actual condensing spot position from the reference position, and setting a plurality of Z-axis directional positions in the range from a starting point to an ending point of detection positions into which the condenser is to be positioned; a laser beam processed groove forming step of sequentially positioning the condenser into the plurality of detection positions in the range from the starting point to the ending point set in the detection position setting step, performing a predetermined interval indexing feeding by operating indexing feeding means each time the detection position for the condenser is changed, and forming a laser beam processed groove of a predetermined length in the plate-shaped body held on the workpiece holding means by operating the laser beam irradiation means and the processing feeding means at each of the detection positions for the condenser; a laser beam processed groove imaging step of imaging the laser beam processed grooves, formed in the plate-shaped body by the laser beam processed groove forming step, by the imaging means; and a laser beam processed groove displaying step of displaying the laser beam processed grooves, imaged by the laser beam processed groove imaging step, on a straight line correspondingly to the detection positions in the range from the starting point to the ending point of the detection positions.