| 发明名称 | Methods of fabricating semiconductor devices and underfill equipment for the same | ||
| 摘要 | A method of fabricating a semiconductor device comprises loading a circuit board including a semiconductor chip into underfill equipment, positioning the circuit board on a depositing chuck of the underfill equipment, filling an underfill material in a space between the semiconductor chip and the circuit board placed on the depositing chuck; transferring the circuit board including the underfill material so that it is positioned on a post-treatment chuck of the underfill equipment; heating the underfill material of the circuit board placed on the post-treatment chuck in a vacuum state, and unloading the circuit board, of which the underfill material has been heated in the vacuum state, from the underfill equipment. | ||
| 申请公布号 | US8956923(B2) | 申请公布日期 | 2015.02.17 |
| 申请号 | US201313835749 | 申请日期 | 2013.03.15 |
| 申请人 | Samsung Electronics Co., Ltd. | 发明人 | Kim Young-Ja;Ko Jun-Young;Jeong Dae-Young;Chan Dae-Sang |
| 分类号 | H01L21/00;B05C13/02;B29C65/00;B05D5/12;H01L21/56 | 主分类号 | H01L21/00 |
| 代理机构 | Onello & Mello, LLP | 代理人 | Onello & Mello, LLP |
| 主权项 | 1. A method of fabricating a semiconductor device, comprising: loading a circuit board including a semiconductor chip into an underfill equipment; positioning the circuit board on a depositing chuck of the underfill equipment; filling an underfill material in a space between the semiconductor chip and the circuit board positioned on the depositing chuck; moving the circuit board including the underfill material so that it is positioned on a post-treatment chuck of the underfill equipment; heating the underfill material in the space between the semiconductor chip and of the circuit board placed on the post-treatment chuck in a vacuum state; and unloading the circuit board including the underfill material which has been heated in the vacuum state, from the underfill equipment, wherein heating the underfill material in the space between the semiconductor chip and the circuit board in a vacuum state includes: moving the circuit board on the post-treatment chuck to within a post-treatment cover; sealing the post-treatment cover; maintaining an interior volume of the post-treatment cover in the vacuum state; and heating the underfill material, and wherein sealing the post-treatment cover includes closing an opened area of the post-treatment cover with the post-treatment chuck. | ||
| 地址 | KR | ||