METHOD AND APPARATUS FOR COLLECTING IODINE FLUORIDE COMPOUND DERIVED FROM IF7

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus for collecting an iodine fluoride compound derived from IFwith high efficiency without utilizing an extremely low temperature.SOLUTION: A method for collecting an iodine fluoride compound derived from IFincludes: bringing gas containing IFinto contact with a fluorinated compound to convert IFinto IF; cooling the gas containing IF; and collecting the IFas an iodine fluoride compound derived from IF. IFis produced by reacting the collected IFwith fluorine, and the produced IFmay be recycled in a semiconductor manufacturing process.