| 摘要 |
本发明提供一种用以处理包含嵌段共聚物层之层叠基板的方法(100)。方法(100)包含辨识嵌段共聚物层中之不均匀度(120)；控制相关于该嵌段共聚物层中之不均匀度的制程变数(140)；在受制程变数影响的制程条件下将嵌段共聚物层退火(160)以补偿该嵌段共聚物层中之不均匀度的至少一部份，而形成包含其中具有改善之均匀度的复数区域之图案。方法(100)更提供用以减少层叠基板中之不均匀度的途径，该层叠基板包含预图案化基材上的嵌段共聚物层。; controlling a process variable correlated to the non-uniformity in the layer of the block copolymer (140); and annealing the layer of the block copolymer under a process condition affected by the process variable (160) to compensate for at least a portion of the non-uniformity in the layer of the block copolymer to form a pattern comprising a plurality of domains having improved uniformity therein. The method (100) further provides a way for reducing a non-uniformity in a layered substrate comprising a layer of a block copolymer on a pre-patterned substrate. |
