发明名称 SILICON CARBIDE MEMBER AND METHOD FOR PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a silicon carbide member which allows efficient and uniform heating in a heating apparatus made of silicon carbide, and to provide a method for producing the same.SOLUTION: The silicon carbide member 10 includes at least a first layer 1 of a silicon carbide sintered compact and a second layer 2 of a silicon carbide sintered compact, and the carbon ratio of the first layer 1 of the silicon carbide sintered compact is higher than that of the second layer 2 of the silicon carbide sintered compact.
申请公布号 JP2015030624(A) 申请公布日期 2015.02.16
申请号 JP20130158603 申请日期 2013.07.31
申请人 BRIDGESTONE CORP 发明人 KOBAYASHI BUNYA
分类号 C04B35/565;C04B41/87;H01L21/31 主分类号 C04B35/565
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