ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROSCOPE, AND SECONDARY ION MASS SPECTROMETRY METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ion group irradiator for facilitating identification of a peak in a secondary ion mass spectrum.SOLUTION: An ion group irradiation device for irradiating a sample with an ion group includes an ion source for generating ions, ion group selection means for selecting more than one ion groups, having a different average mass of ions composing an ion group, from the ions emitted from the ion source, and primary ion irradiation means for irradiating a sample with more than one ion groups. Furthermore, the atomic species or molecular species of ions composing more than one ion groups is common among the ion groups.