| 发明名称 |
Device and Method for Micro-Electro-Mechanical-System Photonic Switch |
| 摘要 |
In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators and a first mirror array optically coupled to the first plurality of collimators. The first mirror array includes a first plurality of first MEMS mirrors integrated on a first substrate and a first plurality of first photodiodes integrated on the first substrate, where the photodiodes are disposed in interstitial spaces between the MEMS mirrors. |
| 申请公布号 |
US2015041629(A1) |
申请公布日期 |
2015.02.12 |
| 申请号 |
US201313964437 |
申请日期 |
2013.08.12 |
| 申请人 |
FutureWei Technologies, Inc. |
发明人 |
Graves Alan Frank;Goodwill Dominic |
| 分类号 |
H03K17/78;G01B11/27 |
主分类号 |
H03K17/78 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A micro-electro-mechanical-system (MEMS) photonic switch comprising:
a first plurality of collimators; and a first mirror array optically coupled to the first plurality of collimators, wherein the first mirror array comprises:
a first plurality of first MEMS mirrors integrated on a first substrate, anda first plurality of first photodiodes integrated on the first substrate, wherein the photodiodes are disposed in interstitial spaces between the MEMS mirrors. |
| 地址 |
Plano TX US |
