SCANNING PROBE MICROSCOPE COMPRISING AN ISOTHERMAL ACTUATOR

摘要

A single-chip scanning probe microscope is disclosed, wherein the microscope includes an isothermal two-dimensional scanner and a cantilever that includes an integrated strain sensor and a probe tip. The scanner is operative for scanning a probe tip about a scanning region on a sample while the sensor measures tip-sample interaction forces. The scanner, cantilever, probe tip, and integrated sensor can be fabricated using the backend processes of a conventional CMOS fabrication process. In addition, the small size of the microscope system, as well as its isothermal operation, enable arrays of scanning probe microscopes to be integrated on a single substrate.

主权项

1. An apparatus comprising:
a substrate that defines a first plane; a first platform that defines a second plane that is parallel with the first plane; and a first scanner that is operative for moving the first platform in two dimensions within the second plane, wherein the first scanner is dimensioned and arranged to constrain motion of the first platform to the second plane, the first scanner comprising a plurality of thermal actuators that are mechanically coupled such that they collectively define an isothermal scanner; wherein the first platform, the first scanner, and the substrate are monolithically integrated.