发明名称 ILLUMINATION DEVICE
摘要 This illumination device comprises: a plurality of light sources which generate illuminating light; a light detection unit which is positioned between the illuminating optical system and the area to be illuminated, and which detects the illumination/intensity of the overall illuminating light provided by the plurality of light sources; and an illumination control unit which performs light emitting control on each of the plurality of light sources. The illumination control unit generates, from the plurality of light sources, measurement illumination light in which the illumination/intensity fluctuates according to the different frequency corresponding to each of the plurality of light sources, and the light detection unit obtains, on the basis of the difference frequencies, the illumination/intensity of the illuminating light which does not include the fluctuation components of each light source, from the overall measuring illuminating light obtained by superimposing the measurement illuminating light from each of the light sources.
申请公布号 WO2015019242(A2) 申请公布日期 2015.02.12
申请号 WO2014IB63537 申请日期 2014.07.30
申请人 ORC MANUFACTURING CO., LTD. 发明人 FUJIMORI, AKIYOSHI;HONDA, TOMOHIKO
分类号 H01L21/027;G01J1/42;G03F7/20;H05B37/02 主分类号 H01L21/027
代理机构 代理人
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