| 摘要 |
A dynamic quantity sensor is provided with a first substrate (10) having a first surface (10a), a second surface (10b) on the side opposite from the first surface, and a recess (15, 42) that constitutes a thin portion (15a) on the first surface side and with a second substrate (20) having a first surface (20a) joined to the first surface of the first substrate and a cavity (20c) that constitutes a sealed space (30) between the first substrate and the second substrate at a portion of the first surface that opposes the recess. The cavity is such that at least a portion of first projection lines (P1) projected from the opening ends of the cavity to the first surface of the first substrate are positioned outside of second projection lines (P2) projected from the boundary lines between the side walls of the recess and the thin portion to the first surface of the first substrate. The first substrate is such that a portion of the thin portion that is positioned inside of the opening ends of the cavity is made to be a thin-film portion (18) that is displaced according to a physical quantity and the areas between the thin-film portion and the portions connected to the opening ends of the cavity are made to be stress relaxation areas (19). |
