发明名称 |
METHOD FOR FABRICATING SPUTTERING TARGET, SPUTTERING TARGET USING THE METHOD, AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SPUTTERING TARGET |
摘要 |
The present invention relates to a method for fabricating a sputtering target which can conduct film formation on an insulating inorganic material in a sputtering method; a sputtering target fabricated thereby; and a method for fabricating an organic light emitting display apparatus using the sputtering target. According to an embodiment of the present invention, the method for fabricating a sputtering target comprises the steps of: preparing a first powdered material including at least tin oxide; fabricating a mixture by mixing the first powdered material and a second powdered material containing carbon; and fabricating a sputtering target by compressing and sintering the mixture while the mixture is in a reducing process. |
申请公布号 |
KR20150014312(A) |
申请公布日期 |
2015.02.06 |
申请号 |
KR20130089822 |
申请日期 |
2013.07.29 |
申请人 |
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发明人 |
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分类号 |
B22F3/12;C04B35/457;C23C14/34 |
主分类号 |
B22F3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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