发明名称 METHOD FOR FABRICATING SPUTTERING TARGET, SPUTTERING TARGET USING THE METHOD, AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SPUTTERING TARGET
摘要 The present invention relates to a method for fabricating a sputtering target which can conduct film formation on an insulating inorganic material in a sputtering method; a sputtering target fabricated thereby; and a method for fabricating an organic light emitting display apparatus using the sputtering target. According to an embodiment of the present invention, the method for fabricating a sputtering target comprises the steps of: preparing a first powdered material including at least tin oxide; fabricating a mixture by mixing the first powdered material and a second powdered material containing carbon; and fabricating a sputtering target by compressing and sintering the mixture while the mixture is in a reducing process.
申请公布号 KR20150014312(A) 申请公布日期 2015.02.06
申请号 KR20130089822 申请日期 2013.07.29
申请人 发明人
分类号 B22F3/12;C04B35/457;C23C14/34 主分类号 B22F3/12
代理机构 代理人
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