| 摘要 |
PROBLEM TO BE SOLVED: To provide a (meth)acrylate compound suitable for a photoresist that has excellent light-transmitting property at a wavelength of 300 nm or less, particularly 250 nm or less, and therefore, has excellent photosensitivity and resolution and that can be used as a permanent film, and to provide a polymeric compound using the (meth)acrylate.SOLUTION: The (meth)acrylate compound is expressed by formula (1) below, and the polymeric compound is prepared by using the (meth)acrylate. In formula (1), Rrepresents a hydrogen atom or a methyl group; Rrepresents a single bond; Rrepresents a fluorophenylene group in which 1 to 4 fluorine atoms are bonded, or a divalent hydrocarbon group having a fluorophenylene group in which 1 to 4 fluorine atoms are bonded, and optionally having an oxygen atom; and Rrepresents a monovalent organic group that desorbs by a strong acid. |
