发明名称 PROBE FIXING STRUCTURE AND OPTICAL MEASURING DEVICE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To provide a probe fixing structure and its optical measuring device.SOLUTION: A probe fixing structure is provided with a substrate and a plurality of fixing modules. The substrate has a hole and groove parts placed around a plurality of holes. The fixing modules join the groove parts and have fixing units and a plurality of probes. The fixing units join the groove parts. The probes go through the groove part and are connected to the fixing units. An optical measuring device comprises a combination of a probe fixing structure and a lens adjustment mechanism having lens, and is used for measuring electrical characteristics of a chip.</p>
申请公布号 JP2015025813(A) 申请公布日期 2015.02.05
申请号 JP20140182294 申请日期 2014.09.08
申请人 MJC PROBE INC 发明人 CHANG CHIA-TAI;TSAI CHIN-YI;CHEN CHIU-KUEI;YU CHEN-CHIH;LAI CHIEN-CHANG;YANG CHIN-TIEN;YANG HUI-PIN;CHANG KENG-SHIENG;HUANG YUN-RU
分类号 G01R1/073;G01R1/06;H01L21/66 主分类号 G01R1/073
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