发明名称 Transport unit and transport apparatus
摘要 <p>The present invention provides a transport unit comprising a base member which includes a bottom wall extending in a transport direction and a pair of side walls standing upright from two side portions, respectively, of the bottom wall; a transport mechanism which is supported by the base member and transports an object to be transported; and a positioning mechanism which is supported by the base member, and positions the object relative to the base member, wherein the object is transported by the transport mechanism.</p>
申请公布号 KR20150013409(A) 申请公布日期 2015.02.05
申请号 KR20140187539 申请日期 2014.12.23
申请人 发明人
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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