| 摘要 |
[Problem] To provide a vacuum pump that makes it possible to efficiently heat, in a focused manner, only fixed components that constitute an exhaust-side gas channel, which need to be brought to a high temperature from the standpoint of preventing the accumulation of a reaction product, prevent the accumulation of the reaction product in the exhaust-side gas channel by heating, and improve the pump exhaust performance, without being affected by the flow rate of the discharged gas. [Solution] The vacuum pump has a rotor which is rotatably disposed on a pump base and a gas channel for guiding gas drawn in by the rotation of the rotor to an exhaust port. The vacuum pump is further provided with a heat-insulating means for insulating the fixed components that constitute the exhaust-side gas channel from other components in the entire gas channel, and a heating means for heating the fixed components insulated in this manner. |
