PYROELECTRIC ALUMINUM NITRIDE MEMS INFRARED SENSOR WITH SELECTIVE WAVELENGTH INFRARED ABSORBER

摘要

A MEMS sensor for detecting electromagnetic waves in a particular frequency range is provided. In a preferred embodiment, the MEMS sensor comprises a bottom substrate layer; a first electrode layer over the substrate layer; a pyroelectric layer over the first electrode layer; and a second electrode layer over the pyroelectric layer; wherein a top electrode layer is patterned with a periodic structure that has a periodicity less than or equal to target infrared wavelength.

主权项

1. A MEMS sensor comprising:
a substrate layer; a first electrode layer adjacent the substrate layer; a pyroelectric layer adjacent the first electrode layer; and a second electrode layer adjacent the pyroelectric layer, wherein the second electrode layer is patterned with a periodic structure that has a periodicity less than or equal to 8 μm.