OXIDE SINTERED BODY, PRODUCTION METHOD THEREOF AND OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide an In-Si-O-based oxide sintered body which enables stable discharge of an oxide sintered body impossible by conventional techniques.SOLUTION: An oxide sintered body is based on indium oxide and contains Si and Zn, in a content of Si of 0.65-1.75, in terms of the Si/In atomic ratio, and a content of Zn of 0.001-0.15, in terms of the Zn/In atomic ratio.