| 摘要 |
<p>A gas distribution assembly is disclosed. The invention comprises a rear plate; a gas distribution plate which has a fixed separating space from the rear plate and is arranged beneath the rear plate; a side supporting member which supports the gas distribution plate and is fixed to the rear plate; and an inserting unit which is capable of moving in the space of the gas distribution plate and is connected to the side supporting member. According the invention, thermal expansion of gas distribution plate and side supporting member can be effectively absorbed, and uniformity of electrical contact between the gas distribution plate and the side supporting member can be ensured.</p> |
