发明名称 PROCESS FOR PRODUCING TWO-DIMENSIONAL NANOMATERIALS
摘要 The present invention provides a process for producing a two-dimensional nanomaterial by chemical vapour deposition (CVD), the process comprising contacting a substrate in a reaction chamber with a first flow which contains hydrogen and a second flow which contains a precursor for said material, wherein the contacting takes place under conditions such that the precursor reacts in the chamber to form said material on a surface of the substrate, wherein the ratio of the flow rate of the first flow to the flow rate of the second flow is at least 5:1. Two-dimensional nanomaterials obtainable by said process are also provided, as well as devices comprising said nanomaterials.
申请公布号 KR20150013142(A) 申请公布日期 2015.02.04
申请号 KR20147030231 申请日期 2013.03.28
申请人 发明人
分类号 B82Y40/00;C01B31/04;C23C16/26;C30B25/18;C30B29/02 主分类号 B82Y40/00
代理机构 代理人
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