PARTICULATE FILM LAMINATING APPARATUS AND PARTICULATE FILM LAMINATING METHOD USING SAME

摘要

A particulate film laminating system (1) includes: a nanoparticle generating chamber (2) in which nanoparticles (12) of a metal material (9) are generated; a nanofiber generating chamber (3) in which nanofibers (13) of a resin material (11) are generated; a laminating chamber (4) in which the nanoparticles (12) and the nanofibers (13) are film-formed and laminated on a substrate (18); a nanoparticle film-forming region (15) configured such that the nanoparticles (12) are film-formed in the laminating chamber (4); a nanofiber film-forming region (16) configured such that the nanofibers (13) are film-formed in the laminating chamber (4); a moving unit (17) which moves the substrate (18) between the nanoparticle film-forming region (15) and the nanofiber film-forming region (16); an exhaust unit (5) which exhausts the laminating chamber (4); and a coolant-gas introduction unit (8) which introduces coolant gas into each of the nanoparticle generating chamber (2) and the nanofiber generating chamber (3).