| 摘要 |
<p>Disclosed are an evaporation unit and an apparatus for deposition having the same. The evaporation unit comprises: an evaporation source; a pellet supply unit connected to the evaporation source, supplying a pellet formed by pressurizing an evaporation material to the evaporation source; and a pellet smash unit smashing the pellet for a smashed evaporation material to be inserted into the evaporation source. The evaporation unit can supply a quantitative evaporation material to the evaporation source, and increase a degree of uniformity of the deposition.</p> |
