发明名称 RAPID THERMAL PROCESSING DEVICE FOR SOLAR CELL
摘要 <p>The present invention relates to a thermal processing device for manufacturing a solar cell, which can rapidly heat-treat a substrate which is used for manufacturing a solar cell and can improve an efficiency of a heat-treating and a quality of the substrate by minimizing a damage of the substrate while evenly heat-transferring to the substrate. The thermal processing device for manufacturing a solar cell comprises: a heat-treating body which is held by a supporter and a bracket on a base; a heat-treating space which is formed to accommodate a substrate for manufacturing a solar cell in the heat-treating body; a glass which is installed on top and bottom side of the heat-treating space ; an entrance which is formed to receive the substrate to be heat-treated in front of the heat-treating space and to eject the heat-treated substrate; an open-close door which opens-closes the entrance; a tray which is configured to settle the substrate to be heat-treated inside of the open-close door; and upper and lower heaters which are installed to arrange a plurality of heaters at upper and lower surfaces of an upper heater body and a lower heater body so as to heat-treat the substrate.</p>
申请公布号 KR101489596(B1) 申请公布日期 2015.02.04
申请号 KR20130128404 申请日期 2013.10.28
申请人 发明人
分类号 H01L31/04;H01L31/18 主分类号 H01L31/04
代理机构 代理人
主权项
地址