Water-reactive Al-based composite material, water-reactive Al-based thermally sprayed film, process for production of such Al-based thermally sprayed film, and constituent member for film-forming chamber

摘要

Herein provided are a water-reactive Al-based composite material which is characterized in that it is produced by incorporating, into Al, 2.0 to 3.5% by mass of In, 0.2 to 0.5% by mass of Si and 0.13 to 0.25% by mass of Ti, and which can be dissolved in water through the reaction thereof in a water-containing atmosphere; a water-reactive Al-based thermally sprayed film produced using this composite material; a method for the production of this Al-based thermally sprayed film; and a constituent member for a film-forming chamber which is provided with this Al-based thermally sprayed film on the surface thereof.

主权项

1. A method for producing a water-reactive Al-based thermally sprayed film, comprising
melting a material comprising
Al;2.0 to 3.5% by mass of In;0.2 to 0.5% by mass of Si; and0.13 to 0.25% by mass of Ti,wherein all mass ratios are based on the total amount of Al,wherein the In, Si and Ti are incorporated into the Al to form a resultingmolten material having a uniform composition; and thermally spraying the molten material on the surface of a substrate, while quenching the sprayed molten material to thus solidify the same and to thereby form a film, wherein after the water-reactive Al-based thermally sprayed film is subjected to an influence of a thermal hysteresis of an order of 300 to 350° C., the Al film is dissolved by being allowed to react with warm water maintained at a temperature ranging from 40 to 130° C.