| 发明名称 |
Apparatus for counting microparticles using a gas reservoir to increase stability of air pressure |
| 摘要 |
A microparticle count apparatus that includes or is connected to a gas reservoir for increasing stability of air pressure at the microparticle counter even when air pressure or air flow rate provided by a nozzle coupled to the microparticle measurement apparatus is unstable. |
| 申请公布号 |
US8943883(B2) |
申请公布日期 |
2015.02.03 |
| 申请号 |
US201213617456 |
申请日期 |
2012.09.14 |
| 申请人 |
HGST Netherlands B.V. |
发明人 |
Okamura Masakazu |
| 分类号 |
G01M9/00 |
主分类号 |
G01M9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microparticle measurement apparatus, wherein the apparatus comprises:
a microparticle counter for counting a number of microparticles in a volume of gas received by the microparticle counter; a vacuum pump for causing the volume of gas to flow through the microparticle counter using negative pressure; and a gas reservoir for increasing stability of air pressure at the microparticle counter even when air pressure or air flow rate provided by a nozzle coupled to the microparticle measurement apparatus is unstable. |
| 地址 |
Amsterdam NL |
