Abrasive slurry and dressing bar for embedding abrasive particles into substrates

摘要

An abrasive polishing slurry including abrasive particles in a carrier fluid and micro-nano members. A system and method for making an abrasive article using the polishing slurry is also disclosed. The system includes a gimballed dressing bar adapted to provide a compressive force sufficient to embed the abrasive particles into the substrate, wherein the members set a height the embedded abrasive particles protrude above the substrate.

主权项

1. A system for making an abrasive article comprising:
abrasive particles in a carrier fluid; micro-nano scale members; a substrate; and a gimballed dressing bar adapted to provide a compressive force sufficient to embed the abrasive particles into the substrate, wherein the micro-nano scale members set a height the embedded abrasive particles protrude above the substrate.