| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a system and a method for electrical determination of MEMS device parameters without applying physical force from the outside, i.e., without expensive and time-consuming physical tests applying various stimuli to a system utilizing MEMS sensors.SOLUTION: A system comprises: a MEMS sensor which comprises a moveable mechanical element configured to be moveable in response to an electromagnetic signal, and comprises a sense contact configured to provide an electromagnetic output signal; a control circuit in electrical communication with the moveable mechanical element of the MEMS sensor, and configured to provide an electromagnetic input signal comprising at least two oscillating frequencies to the moveable mechanical element of the MEMS sensor; and demodulation circuitry in electrical communication with the sense contact of the MEMS sensor and the control circuit, and configured to demodulate the electromagnetic output signal corresponding to motion of the moveable mechanical element and provide a demodulated signal to the control circuit.</p> |
