发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that allows preventing the occurrence of leakage current even with a defect in a fixed charge film, and to provide a method of manufacturing the same.SOLUTION: A photoelectric conversion part 1 of a semiconductor device is formed on inside a primary surface of a semiconductor substrate 100 on a side in which light is incident. An insulating film 2 is formed on the primary surface. A fixed charge film 3 is formed on the insulating film 2. An impurity region 4 is formed on inside the semiconductor substrate 100 directly under a generation position of a defect 31 occurring in the fixed charge film 3.
申请公布号 JP2015023200(A) 申请公布日期 2015.02.02
申请号 JP20130151391 申请日期 2013.07.22
申请人 TOSHIBA CORP 发明人 KOIKE HIDETOSHI
分类号 H01L27/146;H01L31/10 主分类号 H01L27/146
代理机构 代理人
主权项
地址