| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical pressure sensor capable of reducing an influence on flow as much as possible while achieving high-reliability measurement using an FBG, thus having such a great convenience as to allow installation at any place.SOLUTION: An optical pressure sensor 1 comprises: a flat hermetically closed container 2 having a bottom wall 2a and an upper wall 2b; a diaphragm 3 attached to the bottom wall 2a of the hermetically closed container and disposed substantially in parallel to the bottom wall 2a; an FBG 4 disposed inside the hermetically closed container 2 and attached to a thin film 31 of the diaphragm 3 so as to be substantially parallel thereto; an optical fiber 5 connected integrally to the FBG and laid so as to be substantially parallel to the thin film 31 of the diaphragm 3; and an introduction outlet 6, provided on a side wall 2c in a width direction of the hermetically closed container 2, for optically connecting through the optical fiber 5 to an external device. |
