发明名称 HEAT INSULATION UNIT AND THERMAL TREATMENT DEVICE INCLUDING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a heat insulation unit having excellent durability, and a thermal treatment device including the same.SOLUTION: A heat insulation unit 11 includes a heat insulation body 21 comprising silica and alumina, and a heat generation body 22 provided on the inner wall surface of the heat insulation body 21. On the inner wall surface of the heat insulation body 21, plural recess parts 21a are provided in the circumferential direction thereof. The heat generation body 22 is arranged in the recess part 21a so that a part of the heat generation body 22 is exposed from the inner wall surface of the heat insulation body 21. The heat insulation body 21 is formed so that the content of alumina is 65 wt.% or more.
申请公布号 JP2015021598(A) 申请公布日期 2015.02.02
申请号 JP20130152265 申请日期 2013.07.23
申请人 TOKYO ELECTRON LTD 发明人 KOBAYASHI MAKOTO
分类号 F16L59/02;F27B5/14;H01L21/205;H01L21/31;H01L21/324;H05B3/12 主分类号 F16L59/02
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