| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting blade tip shape detection method by which a tip shape of a blade can be easily and correctly detected.SOLUTION: A cutting blade tip shape detection method comprises: a cutting mark formation step of cutting a wafer W by use of a cutting blade 3 having a predetermined width such that an uncut remnant portion 20 is formed in a thickness direction of the wafer W and forming a cutting mark 30 having a width L corresponding to the width of the cutting blade 3; and an irregularity detection step of irradiating the cutting mark 30 with belt-like laser beam 15 extending in a width direction of the cutting mark 30 and detecting an irregular shape of a bottom 31 of the cutting mark 30 on the basis of a reflectance 16 reflected from the bottom 31. In the method, the irregular shape of the bottom 31 of the cutting mark 30 detected in the irregularity detection step can be made to be a tip shape of the cutting blade 3, whereby the tip shape of the cutting blade 3 can be easily and correctly detected. |
