| 摘要 |
<p>Disclosed are a decompression drying apparatus and a method for manufacturing a display device using the same. According to the present invention, the decompression drying apparatus comprises: a chamber having an internal space; a supporting part installed in the chamber, and on which a substrate covered with a treatment solution is mounted; a gas injection part connected to the chamber and injecting treatment gas into the chamber; a decompression part connected to the chamber and decompressing the internal environment of the chamber; and a gas detection part installed in at least one among the chamber and the decompression part, and detecting gas generated when drying the treatment solution.</p> |
