| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To accurately inspect crack and adhesion of a foreign substance or the like on the tip surface of an adsorption nozzle using an image recognition technology. <P>SOLUTION: An illumination device 13 is arranged so as to irradiate the tip surface of the adsorption nozzle 11 with illumination light from an oblique lower part, and a camera 14 which picks up the tip surface of the adsorption nozzle 11 is arranged so as to pick up the tip surface of the adsorption nozzle 11 from the direction in which the illumination light of the illumination device 13 is regularly reflected on the tip surface of the adsorption nozzle 11. Thus, since the light regularly reflected on the tip surface of the adsorption nozzle 11 is made incident in a visual field of the camera 14, and incidence of light, other than the light regularly reflected on the tip surface, which is irregularly reflected at a background part 12 in the visual field of the camera 14 can be reduced, imaging can be performed while making only the ring-like tip surface of the adsorption nozzle 11 bright, the shape of the tip surface of the adsorption nozzle 11 can be clearly identified by making contrast between the ring-like tip surface of the adsorption nozzle 11 and the background part 12 in its inner and outer peripheries large. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
