发明名称 炭素質フィルムの製造方法
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for producing carbonaceous films by heat-treating polymer films, by which the occurrence of foreign substances on the polymer films and the fusion bonding of the polymer films to each other are prevented in the carbonization step to produce carbonaceous films of good quality. <P>SOLUTION: The occurrence of foreign substances and the fusion bonding are prevented by heat-treating the polymer films under reduced pressure or under reduced pressure while introducing an inert gas. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5658782(B2) 申请公布日期 2015.01.28
申请号 JP20130064281 申请日期 2013.03.26
申请人 发明人
分类号 C01B31/02;C01B31/04 主分类号 C01B31/02
代理机构 代理人
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